Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams

Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams

To monitor the damage evolution in Ge nanowires during Mn implantation, in situ transmission electron microscopy observations were carried-out as a function of the Mn fluence. Special interest lies in the sputtering of nanowires. We evidence an enhanced sputtering under the synergetic effects of Mn...

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Main Authors: L. Vincent, M. Fakhfakh, G. Patriarche, C. Renard, D. Bouchier
Format: Article
Language:English
Published: Elsevier 2017-01-01
Series:Results in Physics
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379717308367
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spelling doaj-39c344f8c3bc4365921f6f7114ee0f9a2020-11-25T00:07:28ZengElsevierResults in Physics2211-37972017-01-01738133814Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beamsL. Vincent0M. Fakhfakh1G. Patriarche2C. Renard3D. Bouchier4Centre de Nanoscience et de Nanotechnologies, site d’Orsay Bât 220, rue André Ampère – Université Paris-Sud, 91405 Orsay cedex, FranceCentre de Nanoscience et de Nanotechnologies, site d’Orsay Bât 220, rue André Ampère – Université Paris-Sud, 91405 Orsay cedex, FranceCentre de Nanoscience et de Nanotechnologies, site d’Orsay Bât 220, rue André Ampère – Université Paris-Sud, 91405 Orsay cedex, FranceCentre de Nanoscience et de Nanotechnologies, site d’Orsay Bât 220, rue André Ampère – Université Paris-Sud, 91405 Orsay cedex, FranceCentre de Nanoscience et de Nanotechnologies, site d’Orsay Bât 220, rue André Ampère – Université Paris-Sud, 91405 Orsay cedex, FranceTo monitor the damage evolution in Ge nanowires during Mn implantation, in situ transmission electron microscopy observations were carried-out as a function of the Mn fluence. Special interest lies in the sputtering of nanowires. We evidence an enhanced sputtering under the synergetic effects of Mn implantation and electron beam which may alert experimenters to some possible artefacts related to in situ observations in the case of nanostructures.http://www.sciencedirect.com/science/article/pii/S2211379717308367
collection DOAJ
language English
format Article
sources DOAJ
author L. Vincent
M. Fakhfakh
G. Patriarche
C. Renard
D. Bouchier
spellingShingle L. Vincent
M. Fakhfakh
G. Patriarche
C. Renard
D. Bouchier
Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
Results in Physics
author_facet L. Vincent
M. Fakhfakh
G. Patriarche
C. Renard
D. Bouchier
author_sort L. Vincent
title Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
title_short Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
title_full Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
title_fullStr Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
title_full_unstemmed Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
title_sort enhanced sputtering of ge nanowires under synergetic effect of mn ion and electron beams
publisher Elsevier
series Results in Physics
issn 2211-3797
publishDate 2017-01-01
description To monitor the damage evolution in Ge nanowires during Mn implantation, in situ transmission electron microscopy observations were carried-out as a function of the Mn fluence. Special interest lies in the sputtering of nanowires. We evidence an enhanced sputtering under the synergetic effects of Mn implantation and electron beam which may alert experimenters to some possible artefacts related to in situ observations in the case of nanostructures.
url http://www.sciencedirect.com/science/article/pii/S2211379717308367
work_keys_str_mv AT lvincent enhancedsputteringofgenanowiresundersynergeticeffectofmnionandelectronbeams
AT mfakhfakh enhancedsputteringofgenanowiresundersynergeticeffectofmnionandelectronbeams
AT gpatriarche enhancedsputteringofgenanowiresundersynergeticeffectofmnionandelectronbeams
AT crenard enhancedsputteringofgenanowiresundersynergeticeffectofmnionandelectronbeams
AT dbouchier enhancedsputteringofgenanowiresundersynergeticeffectofmnionandelectronbeams
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