Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams
To monitor the damage evolution in Ge nanowires during Mn implantation, in situ transmission electron microscopy observations were carried-out as a function of the Mn fluence. Special interest lies in the sputtering of nanowires. We evidence an enhanced sputtering under the synergetic effects of Mn...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2017-01-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379717308367 |