Methodology to analyse small silicon samples by glow discharge mass spectrometry using a thin wafer mask

Methodology to analyse small silicon samples by glow discharge mass spectrometry using a thin wafer mask

Glow discharge mass spectrometry (GDMS) is widely used for trace element analysis of bulk solid samples. The geometry of the GD source limits the minimum size of the sample, which for the instrument used in this work (ThermoElementGD) is 20 mm in diameter. From time to time, there is the need to ana...

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Bibliographic Details
Main Authors: C. Modanese, L. Arnberg, M. Di Sabatino
Format: Article
Language:English
Published: Elsevier 2015-01-01
Series:MethodsX
Subjects:
Glow discharge mass spectrometry
Small solid samples
Thin mask
Silicon mask
Tantalum mask
Flat wafer mask
Cathode–anode distance
Bulk analysis by glow discharge mass spectrometry
Online Access:http://www.sciencedirect.com/science/article/pii/S2215016115000539

Internet

http://www.sciencedirect.com/science/article/pii/S2215016115000539

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