Effect of rare earth oxide CeO on the anodic bonding performance of PEG-based MEMS encapsulation materials
Herein, we synthesized a new polyethylene glycol (PEG)-based solid polymer electrolyte containing a rare earth oxide, CeO 2 , using mechanical metallurgy to prepare an encapsulation bonding material for MEMS. The effects of CeO 2 content (0–15 wt.%) on the anodic bonding properties of the composites...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2021-03-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/16878140211007712 |