In-Situ Plasma Monitoring during the Pulsed Laser Deposition of Ni<sub>60</sub>Ti<sub>40</sub> Thin Films
The properties of pulsed laser deposited of Ni<sub>60</sub>Ti<sub>40</sub> shape memory thin films generated in various deposition conditions were investigated. In-situ plasma monitoring was implemented by means of space- and time-resolved optical emission spectroscopy, and I...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-01-01
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Series: | Symmetry |
Subjects: | |
Online Access: | https://www.mdpi.com/2073-8994/12/1/109 |