Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessment
A comparison among three methods for the calibration of tri-axial accelerometers, in particular MEMS, is presented in this paper, paying attention to the uncertainty assessment of each method. The first method is performed according to the ISO 16063 standards. Two innovative methods are analysed...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2018-05-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/7/403/2018/jsss-7-403-2018.pdf |
| Summary: | A comparison among three methods for the calibration of tri-axial
accelerometers, in particular MEMS, is presented in this paper, paying
attention to the uncertainty assessment of each method. The first method is
performed according to the ISO 16063 standards. Two innovative methods are
analysed, both suitable for in-field application. The effects on the whole
uncertainty of the following aspects have been evaluated: the test bench
performances in realizing the reference motion, the vibration reference
sensor, the geometrical parameters and the data processing techniques. The
uncertainty contributions due to the offset and the transverse sensitivity
are also studied, by calibrating two different types of accelerometers, a
piezoelectric one and a capacitive one, to check their effect on the accuracy
of the methods under comparison. The reproducibility of methods is
demonstrated. Relative uncertainty of methods ranges from 3 to 5 %,
depending on the complexity of the model and of the requested operations. The
results appear promising for low-cost calibration of new tri-axial
accelerometers of MEMS type. |
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| ISSN: | 2194-8771 2194-878X |