Performance Degradations of MISFET-Based Hydrogen Sensors with Pd-Ta<sub>2</sub>O<sub>5</sub>-SiO<sub>2</sub>-Si Structure at Long-Time Operation

Performance Degradations of MISFET-Based Hydrogen Sensors with Pd-Ta<sub>2</sub>O<sub>5</sub>-SiO<sub>2</sub>-Si Structure at Long-Time Operation

There are presented the generalized results of studies of performance degradation of hydrogen sensors based on MISFET with structure Pd-Ta<sub>2</sub>O<sub>5</sub>-SiO<sub>2</sub>-Si. It was shown how responses’ parameters change during long-term tests of sensors...

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Bibliographic Details
Main Authors: Boris Podlepetsky, Marina Nikiforova, Andrew Kovalenko
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
hydrogen sensors
MISFET
Pd-Ta<sub>2</sub>O<sub>5</sub>-SiO<sub>2</sub>-Si
responses’ parameters
hydrogen concentrations
time-dependence response’ instability
Online Access:https://www.mdpi.com/2504-3900/2/13/777

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https://www.mdpi.com/2504-3900/2/13/777

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