Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies

Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies

This paper presents an atomic force microscopy (AFM) tip-based nanomachining method to fabricate periodic nanostructures. This method relies on combining the topography generated by machined grooves with the topography resulting from accumulated pile-up material on the side of these grooves. It is s...

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Bibliographic Details
Main Authors: Yanquan Geng, Yongda Yan, Jiqiang Wang, Emmanuel Brousseau, Yanwen Sun, Yazhou Sun
Format: Article
Language:English
Published: Elsevier 2018-12-01
Series:Engineering
Online Access:http://www.sciencedirect.com/science/article/pii/S2095809918304053

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http://www.sciencedirect.com/science/article/pii/S2095809918304053

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