Effects of Temperature and Residual Stresses on the Output Characteristics of a Piezoresistive Pressure Sensor
The effects of temperature on the output performance of piezoresistive pressure sensors are studied in this paper. The influences of the environmental temperature, the residual stress due to the fabrication process, and the residual stress due to the packaging on the piezoresistive coefficient and r...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8653271/ |