Diaphragm shape effect on the performance of foil-based capacitive pressure sensors
We present detailed shape-based analyses to compare the performance of metal foil-based capacitive pressure sensors based on the shape of the diaphragm (top electrode). We perform a detailed analysis on the use of new material and deflection in various shaped diaphragms to act as a performance indic...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5128475 |