Rayleigh Criterion
Photolithography equipment used in the manufacture of semiconductors has been predicted to hit a technological limit based on the Rayleigh criterion in terms of resolution. In actuality, however, the predicted limits of resolution are exceeded and increased microfabrication of photolithography equip...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Global Business Research Center
2017-07-01
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| Series: | Annals of Business Administrative Science |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/abas/16/5/16_0170525a/_pdf/-char/en |