Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency

Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency

The dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride pl...

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Main Authors: Prokhodtsov Alexey, Golikov Alexander, An Pavel, Kovalyuk Vadim, Goltsman Gregory
Format: Article
Language:English
Published: EDP Sciences 2019-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2019/25/epjconf_iwqo18_02009.pdf
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spelling doaj-32ea04f0bd414f05b286f5164091ea702021-08-02T13:37:41ZengEDP SciencesEPJ Web of Conferences2100-014X2019-01-012200200910.1051/epjconf/201922002009epjconf_iwqo18_02009Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiencyProkhodtsov AlexeyGolikov Alexander0An PavelKovalyuk VadimGoltsman GregoryMoscow State Pedagogical UniversityThe dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride platform.https://www.epj-conferences.org/articles/epjconf/pdf/2019/25/epjconf_iwqo18_02009.pdf
collection DOAJ
language English
format Article
sources DOAJ
author Prokhodtsov Alexey
Golikov Alexander
An Pavel
Kovalyuk Vadim
Goltsman Gregory
spellingShingle Prokhodtsov Alexey
Golikov Alexander
An Pavel
Kovalyuk Vadim
Goltsman Gregory
Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
EPJ Web of Conferences
author_facet Prokhodtsov Alexey
Golikov Alexander
An Pavel
Kovalyuk Vadim
Goltsman Gregory
author_sort Prokhodtsov Alexey
title Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
title_short Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
title_full Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
title_fullStr Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
title_full_unstemmed Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
title_sort effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
publisher EDP Sciences
series EPJ Web of Conferences
issn 2100-014X
publishDate 2019-01-01
description The dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride platform.
url https://www.epj-conferences.org/articles/epjconf/pdf/2019/25/epjconf_iwqo18_02009.pdf
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AT golikovalexander effectofsiliconoxidecoatingonasiliconnitridefocusinggratingcouplerefficiency
AT anpavel effectofsiliconoxidecoatingonasiliconnitridefocusinggratingcouplerefficiency
AT kovalyukvadim effectofsiliconoxidecoatingonasiliconnitridefocusinggratingcouplerefficiency
AT goltsmangregory effectofsiliconoxidecoatingonasiliconnitridefocusinggratingcouplerefficiency
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