Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency

by Prokhodtsov Alexey, Golikov Alexander, An Pavel, Kovalyuk Vadim, Goltsman Gregory
Published 2019-01-01

Method for determination of resists parameters for photonic - integrated circuits e-beam lithography on silicon nitride platform

by Elmanov Ilia, Elmanova Anna, Komrakova Sophia, Golikov Alexander, Kaurova Natalya, Kovalyuk Vadim, Goltsman Gregory
Published 2019-01-01

Superconducting single-photon detector for integrated waveguide spectrometer

by Korneev Alexander, Kovalyuk Vadim, An Pavel, Golikov Alexander, Zubkova Evgeniya, Ferrari Simone, Kahl Oliver, Pernice Wolfram, Goltsman Gregory
Published 2018-01-01

Integration of nanodiamonds with NV-centers on optical silicon nitride structures

by Elmanova Anna, Elmanov Ilia, Komrakova Sophia, Golikov Alexander, Javadzade Javid, Vorobyev Vadim, Bolshedvorskii Stephan, Soshenko Vladimir, Akimov Alexey, Kovalyuk Vadim, Goltsman Gregory
Published 2019-01-01