Investigation of vanadium and nitride alloys thin layers deposited by PVD
In this work we present the technique of magnetron vapor deposition and the effect of several deposition parameters on the structural and morphological properties of prepared thin films. It was noted that the deposition time has an effect on the crystallinity, mechanical properties such as residual...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2012-06-01
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| Series: | EPJ Web of Conferences |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1051/epjconf/20122900042 |