Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS

Tungsten carbide (WC) and Tungsten carbonitride (WCN) coatings are deposited by reactive high-power impulse magnetron sputtering (HiPIMS) with various nitrogen gas flow rates. The characteristics of discharge current and plasma optical emission of HiPIMS are recorded by oscilloscope (OSC) and optica...

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Bibliographic Details
Main Authors: Weifeng He, Yuhui Yang, Shuqi Huang, Shuyu Fan, Min Hu, Yongchao Wang, Wei Xu, Lei Wang
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Coatings
Subjects:
WCN
HiPIMS
discharge characteristics
mechanical properties
tribological performance
Online Access:https://www.mdpi.com/2079-6412/11/4/481

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