Influences of Nitrogen Flow Rate on Microstructure, Mechanical and Tribological Properties of WCN Coatings Deposited by HiPIMS
Tungsten carbide (WC) and Tungsten carbonitride (WCN) coatings are deposited by reactive high-power impulse magnetron sputtering (HiPIMS) with various nitrogen gas flow rates. The characteristics of discharge current and plasma optical emission of HiPIMS are recorded by oscilloscope (OSC) and optica...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-04-01
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Series: | Coatings |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-6412/11/4/481 |