Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm2. The humidity sensor consists of a s...

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Bibliographic Details
Main Authors: De-Hao Lu, Ching-Liang Dai, Ming-Zhi Yang
Format: Article
Language:English
Published: MDPI AG 2010-11-01
Series:Sensors
Subjects:
humidity sensors
polypyrrole
CMOS-MEMS
ring oscillator circuits
Online Access:http://www.mdpi.com/1424-8220/10/11/10095/

Internet

http://www.mdpi.com/1424-8220/10/11/10095/

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