Atomic layer deposition enabling higher efficiency solar cells: A review
Atomic layer deposition (ALD) can synthesise materials with atomic-scale precision. The ability to tune the material composition, film thickness with excellent conformality, allow low-temperature processing, and in-situ real-time monitoring makes this technique very appealing for a wide range of app...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
KeAi Communications Co., Ltd.
2020-09-01
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Series: | Nano Materials Science |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2589965119300662 |