Effect of various nitrogen flow ratios on the optical properties of (Hf:N)-DLC films prepared by reactive magnetron sputtering
Hf and N co-doped diamond-like carbon [(Hf:N)-DLC] films were deposited on 316L stainless steel and glass substrates through reactive magnetron sputtering of hafnium and carbon targets at various nitrogen flow ratios (R=N2/[N2+CH4+Ar]). The effects of chemical composition and crystal structure on th...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-08-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4993631 |