Cross-Linked Nanoparticle Membranes for Microelectromechanical Chemical Sensors and Pressure Sensors

Cross-Linked Nanoparticle Membranes for Microelectromechanical Chemical Sensors and Pressure Sensors

We present novel microelectromechanical chemical sensors for the detection of volatile organic compounds based on electrostatically actuated, nanometer-thin, freestanding membranes of organically cross-linked gold nanoparticles. The sensors employ quasi-static deflection amplitudes or resonance freq...

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Bibliographic Details
Main Authors: Hendrik Schlicke, Hauke Hartmann, Sophia Caroline Bittinger, Matthias Rebber, Malte Behrens, Tobias Vossmeyer
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Proceedings
Subjects:
gold
nanoparticles
nanocomposites
membranes
pressure sensors
chemical sensors
actuators
resonators
MEMS
NEMS
Online Access:https://www.mdpi.com/2504-3900/2/13/821

Internet

https://www.mdpi.com/2504-3900/2/13/821

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