Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas
The preparation of ZnO thin films with controlled electrical resistivity and optical properties is often challenged by the presence of defects, such as oxygen vacancies or interstitial zinc. Here, we investigate the material properties of ZnO polycrystalline thin films prepared by thermal Atomic Lay...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-06-01
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| Series: | Results in Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X20300303 |