Current–voltage characteristics and breakdown of different structural planar microelectrodes in atmospheric air
With the development of applications for microelectromechanical system (MEMS) components and micromachining technology, planar microelectrodes have attracted considerable interest. To study the discharge characteristics of these structures, planar microelectrodes with a variety of plate-shaped and n...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0050121 |