Error Separation for Wide Area Film Measurement
We wanted to use a multiple probes and white light interferometer to measure the surface profile of thin film. However, this system, as assessed with a scanning method, suffers from the presence of a moving stage and systematic sensor errors. In this paper, in order to separate measurement error cau...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2014-09-01
|
| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/september_2014/Vol_178/P_2366.pdf |