A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes
Micro-sieves have been widely used in medical treatment, quarantine, environment, agriculture, pharmacy and food processing. However, the manufacturing and yield improvement have been difficult due to multiple challenges, such as the sieve unit release defect, cracking, and KOH corrosion. In this pa...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
JommPublish
2018-09-01
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| Series: | Journal of Microelectronic Manufacturing |
| Subjects: | |
| Online Access: | http://www.jommpublish.org/p/15/ |