Effects of different annealing temperatures on the physical, optical, and electrical characteristics and chemical bonds of Ga and F Co-doped ZnO films

In this study, we would investigate the effect of annealing temperature on the physical, optical, and electrical characteristics and chemical bonds of F- and Ga-co-doped ZnO (FGZO) Films. At first, 3 wt% Ga2O3 was mixed with 97 wt% ZnO to form the Ga-doped ZnO ceramic target, and the radio frequency...

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Bibliographic Details
Main Authors: Chiang-Lung Lin, Fang-Hsing Wang, He-Syun Jhuang, Cheng-Fu Yang
Format: Article
Language:English
Published: Elsevier 2020-05-01
Series:Journal of Materials Research and Technology
Subjects:
CF4
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785420303409