Catalysts based on Fenton reaction for SiC wafer in chemical magnetorheological finishing
Aiming at the chemical magnetorheological finishing (CMRF) of single crystal silicon carbide (SiC) based on the Fenton reaction, concentration of hydroxyl radical produced in Fenton reaction and its influence on chemical reaction rate of SiC were detected by visible spectrophotometry, and catalytic...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIMS Press
2018-11-01
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| Series: | AIMS Materials Science |
| Subjects: | |
| Online Access: | http://www.aimspress.com/article/10.3934/matersci.2018.6.1112/fulltext.html |