Impacts of sensor layouts on the performance of a long-stroke nano-positioning stage
This article develops a long-stroke nano-positioning stage and discusses the impacts of sensor layouts on the positioning performance. The stage consists of a piezoelectric-transducer stage and a motor stage. First, we obtain the transfer functions of the two stages by experiments and design robust...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2016-11-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814016680192 |