Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester

Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester

A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (<100 Hz) vibrational energy into electricity with high efficiency. With wafer-level micro electro mechanical systems (MEMS) fabrication to form a...

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Bibliographic Details
Main Authors: Nianying Wang, Ruofeng Han, Changnan Chen, Jiebin Gu, Xinxin Li
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
kinetic energy harvester
electromagnetic electricity generation
double-deck 3D metal solenoids
MEMS technology
micro-casting technology
wafer-level fabrication
Online Access:https://www.mdpi.com/2072-666X/12/1/74

Internet

https://www.mdpi.com/2072-666X/12/1/74

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