Design and Analysis of a High Force, Low Voltage and High Flow Rate Electro-Thermal Micropump

Design and Analysis of a High Force, Low Voltage and High Flow Rate Electro-Thermal Micropump

This paper presents the design and simulation of an improved electro-thermal micromachined pump for drug delivery applications. Thermal actuators, which are a type of Micro Electro Mechanical system (MEMS) device, are highly useful because of their ability to deliver with great force and displacemen...

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Bibliographic Details
Main Authors: Ghader Yosefi, Sattar Mirzakuchaki, Farshid Raissi, Saeid Afrang
Format: Article
Language:English
Published: MDPI AG 2014-12-01
Series:Micromachines
Subjects:
MEMS micropump
electro thermal actuator
joule heating
pumping force
flow rate
Online Access:http://www.mdpi.com/2072-666X/5/4/1323

Internet

http://www.mdpi.com/2072-666X/5/4/1323

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