Chemical Vapour Precipitation of Silicon Nitride Powders in a Laser Reactor

Chemical Vapour Precipitation of Silicon Nitride Powders in a Laser Reactor

Abstract The Laser Chemical Vapour Precipitation (L-CVP) of Si3N4 powders from mixtures of halogenated silanes and NH3 has been studied. The reactant gases were mixed at varying position in the laser beam, thus preventing low temperature react...

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Bibliographic Details
Main Authors: R. A. Bauer, F. E. Kruis, P. van der Put, B. Scarlett, J. Schoonman
Format: Article
Language:English
Published: Hosokawa Powder Technology Foundation 2014-06-01
Series:KONA Powder and Particle Journal
Online Access:https://www.jstage.jst.go.jp/article/kona/8/0/8_1990022/_pdf/-char/en

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