Chemical Vapour Precipitation of Silicon Nitride Powders in a Laser Reactor
Abstract The Laser Chemical Vapour Precipitation (L-CVP) of Si3N4 powders from mixtures of halogenated silanes and NH3 has been studied. The reactant gases were mixed at varying position in the laser beam, thus preventing low temperature react...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hosokawa Powder Technology Foundation
2014-06-01
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| Series: | KONA Powder and Particle Journal |
| Online Access: | https://www.jstage.jst.go.jp/article/kona/8/0/8_1990022/_pdf/-char/en |