Study of interface reactions between Ti/Al/Ni/Au metallization and AlGaN/GaN heterostructures
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2013-02-01
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Series: | Open Physics |
Subjects: | |
Online Access: | https://doi.org/10.2478/s11534-012-0158-0 |