A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning
This paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating of any size. It adopts a specially designed optical path that can increase the alignment tolerance be...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA)
2011-12-01
|
| Series: | International Journal of Automation and Smart Technology |
| Subjects: | |
| Online Access: | http://www.ausmt.org/index.php/AUSMT/article/view/53 |