Microstructure, Residual Stress, Corrosion and Wear Resistance of Vacuum Annealed TiCN/TiN/Ti Films Deposited on AZ31
Composite titanium carbonitride (TiCN) thin films deposited on AZ31 by DC/RF magnetron sputtering were vacuum annealed at different temperatures. Vacuum annealing yields the following on the structure and properties of the films: the grain grows and the roughness increases with an increase of anneal...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-12-01
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Series: | Metals |
Subjects: | |
Online Access: | http://www.mdpi.com/2075-4701/7/1/5 |