Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (<i>SW-PnC</i>) is proposed to suffici...
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MDPI AG
2019-09-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/9/626 |
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doaj-297cbaf69f4a457ca6d30f55eeae2d162020-11-25T02:12:18ZengMDPI AGMicromachines2072-666X2019-09-0110962610.3390/mi10090626mi10090626Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy DissipationFei-Hong Bao0Xue-Qian Wu1Xin Zhou2Qi-Die Wu3Xiao-Sheng Zhang4Jing-Fu Bao5School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 61173, ChinaYingcai Honors College, University of Electronic Science and Technology of China, Chengdu 61173, ChinaSchool of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 61173, ChinaYingcai Honors College, University of Electronic Science and Technology of China, Chengdu 61173, ChinaSchool of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 61173, ChinaSchool of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 61173, ChinaPhononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (<i>SW-PnC</i>) is proposed to sufficiently isolate the wave vibration. Finite-element analysis is performed to gain insight into the transmission property of finite PnC, and band characteristics by infinite periods. In comparison with the circle hole PnC at a similar bandgap, due to its already very lightweight PnC structure compared with previously reported PnCs, the proposed PnC offers a significantly lighter weight, smaller lattice constant, and greater energy leakage inhibition. More specifically, the resonator with the <i>SW-PnC</i> plate as the anchoring substrate exhibited a quality factor as high as 66569.7 at 75.82 MHz.https://www.mdpi.com/2072-666X/10/9/626phononic crystalspiezoelectricMEMS resonatorenergy dissipationfinite-element-analysisbandgaptransmission propertyquality factor |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Fei-Hong Bao Xue-Qian Wu Xin Zhou Qi-Die Wu Xiao-Sheng Zhang Jing-Fu Bao |
| spellingShingle |
Fei-Hong Bao Xue-Qian Wu Xin Zhou Qi-Die Wu Xiao-Sheng Zhang Jing-Fu Bao Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation Micromachines phononic crystals piezoelectric MEMS resonator energy dissipation finite-element-analysis bandgap transmission property quality factor |
| author_facet |
Fei-Hong Bao Xue-Qian Wu Xin Zhou Qi-Die Wu Xiao-Sheng Zhang Jing-Fu Bao |
| author_sort |
Fei-Hong Bao |
| title |
Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation |
| title_short |
Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation |
| title_full |
Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation |
| title_fullStr |
Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation |
| title_full_unstemmed |
Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation |
| title_sort |
spider web-like phononic crystals for piezoelectric mems resonators to reduce acoustic energy dissipation |
| publisher |
MDPI AG |
| series |
Micromachines |
| issn |
2072-666X |
| publishDate |
2019-09-01 |
| description |
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (<i>SW-PnC</i>) is proposed to sufficiently isolate the wave vibration. Finite-element analysis is performed to gain insight into the transmission property of finite PnC, and band characteristics by infinite periods. In comparison with the circle hole PnC at a similar bandgap, due to its already very lightweight PnC structure compared with previously reported PnCs, the proposed PnC offers a significantly lighter weight, smaller lattice constant, and greater energy leakage inhibition. More specifically, the resonator with the <i>SW-PnC</i> plate as the anchoring substrate exhibited a quality factor as high as 66569.7 at 75.82 MHz. |
| topic |
phononic crystals piezoelectric MEMS resonator energy dissipation finite-element-analysis bandgap transmission property quality factor |
| url |
https://www.mdpi.com/2072-666X/10/9/626 |
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