Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (<i>SW-PnC</i>) is proposed to suffici...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/10/9/626 |