Comparative Study of Furnace and Flash Lamp Annealed Silicon Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition

Comparative Study of Furnace and Flash Lamp Annealed Silicon Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition

Low-temperature growth of microcrystalline silicon (mc-Si) is attractive for many optoelectronic device applications. This paper reports a detailed comparison of optical properties, microstructure, and morphology of amorphous silicon (a-Si) thin films crystallized by furnace annealing and flash lamp...

Full description

Bibliographic Details
Main Authors: Maheshwar Shrestha, Keliang Wang, Bocong Zheng, Laura Mokrzycki, Qi Hua Fan
Format: Article
Language:English
Published: MDPI AG 2018-03-01
Series:Coatings
Subjects:
flash lamp annealing
crystallization
amorphous silicon
microcrystalline silicon
thin films
Online Access:http://www.mdpi.com/2079-6412/8/3/97

Internet

http://www.mdpi.com/2079-6412/8/3/97

Similar Items