Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications
This paper presents a micromachining process for lithium niobate (LiNbO<sub>3</sub>) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/8/2206 |