Novel graphene‐based optical MEMS accelerometer dependent on intensity modulation

Novel graphene‐based optical MEMS accelerometer dependent on intensity modulation

This paper proposes a novel graphene‐based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and...

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Bibliographic Details
Main Authors: Mehdi Ahmadian, Kian Jafari, Mohammad Javad Sharifi
Format: Article
Language:English
Published: Electronics and Telecommunications Research Institute (ETRI) 2018-09-01
Series:ETRI Journal
Subjects:
accelerometer
graphene
intensity modulation
microelectromechanical systems
Online Access:https://doi.org/10.4218/etrij.2017-0309

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