Novel graphene‐based optical MEMS accelerometer dependent on intensity modulation
This paper proposes a novel graphene‐based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Electronics and Telecommunications Research Institute (ETRI)
2018-09-01
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Series: | ETRI Journal |
Subjects: | |
Online Access: | https://doi.org/10.4218/etrij.2017-0309 |