Tantalum-Doped TiO<sub>2</sub> Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells

Tantalum-Doped TiO<sub>2</sub> Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells

Tantalum (Ta)-doped titanium oxide (TiO<sub>2</sub>) thin films are grown by plasma enhanced atomic layer deposition (PEALD), and used as both an electron transport layer and hole blocking compact layer of perovskite solar cells. The metal precursors of tantalum ethoxide and titanium iso...

Full description

Bibliographic Details
Main Authors: Chia-Hsun Hsu, Ka-Te Chen, Ling-Yan Lin, Wan-Yu Wu, Lu-Sheng Liang, Peng Gao, Yu Qiu, Xiao-Ying Zhang, Pao-Hsun Huang, Shui-Yang Lien, Wen-Zhang Zhu
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Nanomaterials
Subjects:
tantalum
titanium oxide
atomic layer deposition
bubbler temperature
perovskite solar cell
electron transport layer
Online Access:https://www.mdpi.com/2079-4991/11/6/1504

Internet

https://www.mdpi.com/2079-4991/11/6/1504

Similar Items