Development of a Micro-SPM (Scanning Probe Microscope) by Post-Assembly of a MEMS-Stage and an Independent Cantilever
The development of miniature scanning probe microscopes (SPM) on the basis of the MEMS technique has gained more and more interest. Here a novel approach is presented to realize a micro-SPM, in which by means of post-assembly a conventional cantilever is mounted onto a MEMS positioning stage and us...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2007-08-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/august_07/P_178.pdf |
| Summary: | The development of miniature scanning probe microscopes (SPM) on the basis of the MEMS technique has gained more and more interest. Here a novel approach is presented to realize a micro-SPM, in which by means of post-assembly a conventional cantilever is mounted onto a MEMS positioning stage and used to detect the topography variation of the surface under test. Compared with other integrated micro-SPMs, the proposed micro-SPM can maintain the lateral resolution by simply renewing its cantilever in use, and therefore features low cost, practicability and longer lifetime. Preliminary experimental results are reported, which demonstrate that the proposed microSPM can be realized.
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| ISSN: | 2306-8515 1726-5479 |