Development of a Micro-SPM (Scanning Probe Microscope) by Post-Assembly of a MEMS-Stage and an Independent Cantilever
The development of miniature scanning probe microscopes (SPM) on the basis of the MEMS technique has gained more and more interest. Here a novel approach is presented to realize a micro-SPM, in which by means of post-assembly a conventional cantilever is mounted onto a MEMS positioning stage and us...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-08-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/august_07/P_178.pdf |