Temperature Fluctuation Attenuation of Circulating Cooling Water Using Dynamic Thermal Filtering

Temperature Fluctuation Attenuation of Circulating Cooling Water Using Dynamic Thermal Filtering

The Demand for circulating cooling water (CCW) with high temperature stability and a quick response to temperature control is essential for precision engineering, so a dynamic thermal filtering method is proposed in this paper. Some CCW is bypassed, blocked, and used as a thermal capacity medium, an...

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Bibliographic Details
Main Authors: Yesheng Lu, Junning Cui, Jiubin Tan, Xingyuan Bian, Yamin Zhao
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Applied Sciences
Subjects:
dynamic thermal filtering
circulating cooling water
temperature stability
quick response
lithography
Online Access:https://www.mdpi.com/2076-3417/10/15/5338

Internet

https://www.mdpi.com/2076-3417/10/15/5338

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