Multiscale Computational Fluid Dynamics: Methodology and Application to PECVD of Thin Film Solar Cells
This work focuses on the development of a multiscale computational fluid dynamics (CFD) simulation framework with application to plasma-enhanced chemical vapor deposition of thin film solar cells. A macroscopic, CFD model is proposed which is capable of accurately reproducing plasma chemistry and tr...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-02-01
|
| Series: | Coatings |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2079-6412/7/2/22 |