Focused Ion Beam Nanopatterning for Carbon Nanotube Ropes Based Sensor
Focused Ion Beam (FIB) technology has been used to realize electrode patterns for contacting Single Walled Carbon Nanotubes (SWCNTs) ropes for chemical gas sensor applications. Two types of transducers, based on a single rope and on bundles, have been realized starting from silicon/Si3N4 substrate....
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_07/P_204.pdf |
| Summary: | Focused Ion Beam (FIB) technology has been used to realize electrode patterns for contacting Single Walled Carbon Nanotubes (SWCNTs) ropes for chemical gas sensor applications. Two types of transducers, based on a single rope and on bundles, have been realized starting from silicon/Si3N4 substrate. Electrical behaviour, at room temperature, in toxic gas environments, has been investigated and compared to evaluate contribution of a single rope based sensor respect to bundles one. For all the devices, upon exposure to NO2 and NH3, the conductance has been found to increase or decrease respectively. Conductance signal is stronger for sensor based on bundles, but it also evident that response time in NO2 is faster for device based on a single rope. FIB technology offers, then, the possibility to contact easily a single sensitive nanowire, as carbon nanotube rope. |
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| ISSN: | 2306-8515 1726-5479 |