Focused Ion Beam Nanopatterning for Carbon Nanotube Ropes Based Sensor
Focused Ion Beam (FIB) technology has been used to realize electrode patterns for contacting Single Walled Carbon Nanotubes (SWCNTs) ropes for chemical gas sensor applications. Two types of transducers, based on a single rope and on bundles, have been realized starting from silicon/Si3N4 substrate....
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_07/P_204.pdf |