Structure and tribo-mechanical properties of Si- and W-containing amorphous carbon based multilayers
Designing the film architecture of amorphous carbon based systems is effective in tailoring the tribo-mechanical properties. For this purpose, alternating a-C and a-C:X layers, with X = Si or W, were grown with a layer ratio of 1, a bilayer period of ~200 nm, and a bilayers number of 5 in a magnetro...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-09-01
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| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523921000519 |