Structure and tribo-mechanical properties of Si- and W-containing amorphous carbon based multilayers

Structure and tribo-mechanical properties of Si- and W-containing amorphous carbon based multilayers

Designing the film architecture of amorphous carbon based systems is effective in tailoring the tribo-mechanical properties. For this purpose, alternating a-C and a-C:X layers, with X = Si or W, were grown with a layer ratio of 1, a bilayer period of ~200 nm, and a bilayers number of 5 in a magnetro...

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Bibliographic Details
Main Authors: Wolfgang Tillmann, Nelson Filipe Lopes Dias, Dominic Stangier, Serguei Matveev, Carl-Arne Thomann, Jörg Debus
Format: Article
Language:English
Published: Elsevier 2021-09-01
Series:Applied Surface Science Advances
Subjects:
Amorphous carbon
Silicon
Tungsten
Multilayer
Magnetron sputtering, Raman scattering spectroscopy
Soft x-ray emission spectroscopy
Online Access:http://www.sciencedirect.com/science/article/pii/S2666523921000519

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http://www.sciencedirect.com/science/article/pii/S2666523921000519

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