Sliding Mode Tracking Control With Perturbation Estimation for Hysteresis Nonlinearity of Piezo-Actuated Stages
Piezo-actuated stages are widely applied in the field of high-precision positioning. However, piezo-actuated stages produce hysteresis between the input voltage and the output displacement that negatively influences the positioning accuracy. In this paper, the Bouc-Wen model is established and ident...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8365771/ |